Design For Improvement Of Metrology And Inspection Of Integrated Circuit For Accuracy Check Using Smartscope Application

Alias, Farah Nurhidayah (2017) Design For Improvement Of Metrology And Inspection Of Integrated Circuit For Accuracy Check Using Smartscope Application. Project Report. Universiti Teknikal Malaysia Melaka, Melaka, Malaysia. (Submitted)

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Abstract

The aim of this project is to design an inspection checking fixture that can be used in accuracy check process.The fixture is designed as an aid in conducting automatic mode of the process.In conceptual design stage, there are several proposed conceptual designs are generated which must follow design constraints that are set.Then,all of the conceptual designs underwent Pugh’s Method for concept selection to come out with the best conceptual design.The selection is done based on 10 criteria that are set to meet customer’s requirement.The best conceptual design goes to Conceptual Design 1 (CD-1) that obtained highest score of 5.The design underwent further development with Failure Mode Effects Analysis (FMEA).The analysis has improved the design based on potential failure mode that are detected.After that,the final design is generated.The design is then sent for fabrication process using 3D printing method.After the prototype is fabricated, the prototype went of design validation to verify the functionality of the prototype. This phase is conducted using SmartScope application which the real accuracy check process is performed.The results generated from this process proved the design is validated.

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