Gage Capability Study Of Thin Film Coating Thickness Measurement Method Using Scanning Electron Microscopes (SEM)

Saifol Azman , Nordin (2007) Gage Capability Study Of Thin Film Coating Thickness Measurement Method Using Scanning Electron Microscopes (SEM). Project Report. UTeM, Melaka, Malaysia. (Submitted)

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Abstract

Gage capability study is the procedure to determine error of measuring system represented by repeatability, reproducibility and precision to tolerance ratio (P/T). Thin film coatings on cutting tools are to improve tool propertied with respect to its high hardness, low coefficient of friction, thermal stability and excellent wear resistance. These properties are influenced by the coating thickness. Due to this it is important to be able to measure coating thickness accurately. This study investigates the suitability of measuring thin film coating thickness using SEM system by conducting gage capability study. The measured artifact in this study was cutting insert with WC substrate and TiN coating. The main objectives of this study are to ascertain the suitability of Scanning Electron Microscope (SEM) thickness measurement method for thin film coating and to identify and minimize the variation of measuring tool. From the experimental data, repeatability & reproducibility and PIT ratio was calculated. Based on those data, this study found out that with proper sample preparation and measuring method SEM is a viable measuring tool to determine thin film coating thickness.

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