Deposition And Characterization Of Tin Coated PVD Sputtering Of Magnetized Substrate

Mohd Razali, Muhamad (2013) Deposition And Characterization Of Tin Coated PVD Sputtering Of Magnetized Substrate. Project Report. UTeM, Melaka, Malaysia. (Submitted)

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Abstract

External magnetic fields are applied by mounting permanent magnets on the substrate holder in the Physical Vapor Deposition (PVD) magnetron sputtering machine. Three experiments are performed including the transverse permanent magnet, the parallel permanent magnet and without permanent magnet. The materials investigated are Tungsten Carbide inserted with cobalt contents of 3.09, 6.58 and 7.60 wt.%. The objectives of the study are to develop a systematic method to create a magnetic field at the vicinity of substrate surface, to assess the impact of substrate magnetic field on the deposited coating (TiN) properties using DOE approach and to characterize and evaluate the coating performance that includes hardness, thickness, crystallographic and coating adhesion. The coating thickness is obtained by using Field Emission Scanning Electron Microscopy (FESEM) while the coating structure and morphology are obtained by using X-ray Diffraction (XRD) and Atomic Force Microscopy (AFM), respectively. The coating hardness and adhesion are obtained by using micro-hardness test and indentation test. Analysis of the coating thickness shows that generally the coating thickness increases when transverse permanent magnet at the substrate holder is used. At 7. 60 wt. % cobalt content, the thick coating ( ~800 nm) is achieved by using the transverse permanent magnet due to high ions density around the substrate for the bombardment of growing film. The coating hardness, structure and morphology are significantly influenced by using transverse permanent magnet at the substrate holder while the interaction of cobalt content and transverse permanent magnet significantly influences the adhesion strength due to the coating densification or re-sputtering of deposited atom. This indicates that applying external magnetic fields by mounting transverse permanent magnets on the substrate holder has an ability to change the quality of the TiN coating.

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