Optimization Of The Fabrication Process Parameters Of An Optical Modulator

Mohammad Azwan Safwan, Harun (2015) Optimization Of The Fabrication Process Parameters Of An Optical Modulator. Project Report. UTeM, Melaka, Malaysia. (Submitted)

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Abstract

The purpose of this project is to optimize the fabrication process parameters of an optical modulator. An optical modulator is an optical device which can manipulated the optical signal controlled by light source. The basic formation of optical modulator is based on optical waveguides. The main function of optical modulator is to convert the electrical signal to an optical signal. The L9 orthogonal array of Taguchi Method was employed in this project to optimize the performance of modulation efficiency and absorption loss. The optimized silicon-based waveguide designs are aimed to be implemented in future photonic devices such as optical modulators. The project created simple process of modeling, optimization and characterization of silicon optical waveguides using Silvaco software. The dry etching are considered to evaluate the effect of etching techniques on the waveguide structure. The project involved both N-type and P-type dopants using silicon waveguide with the orientation of <100>. The silicon optical waveguide fabrication process has been done through multilevel fabrication process with the use of Silvaco software and the optimization of the silicon optical waveguide based on modulation efficiency and absorption loss have been analyzed.

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