Design Consideration Of Microheater Structure For Micro Devices Applications

Nur 'Afifah, Shaiful Bahrin (2015) Design Consideration Of Microheater Structure For Micro Devices Applications. Project Report. UTeM, Melaka, Malaysia. (Submitted)

Text (24 Pages) Design Consideration Of Microheater Structure For Micro Devices Applications.pdf - Submitted Version Download (796kB)

Abstract

For past few years, microheater has been widely investigated because of their extensive applications in gas sensors, flow rate sensors and other micro system. Basically, the optimum performance of microheater can be determine by low power consumption, low thermal mass and better temperature uniformity. The design consideration ofmicroheater structure using polymer based material for micro device application is performed in this thesis. The purpose of this project is to define which polymer based material and other suitable material will be used to form the heater device through sputtering and micro device fabrication process. For the design consideration, COMSOL Multiphysics 4.4 is used to perform and implement the simulation analysis in purpose to get the optimum performance of microheater and to determine the best polymer based material to be chosen as main material for fabrication process. As a result, for microheater substrate, polyimide material produced the highest output temperature, while gold material give the highest temperature for heating element. Meanwhile, in term of uniformity output temperature, polysilicon is always the best. The collected data are recorded and perform in graph analysis.

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