Design And Characterization Of ISFET Based Device For Biomedical Applications

Liau, Kok Keong (2019) Design And Characterization Of ISFET Based Device For Biomedical Applications. Project Report. Universiti Teknikal Malaysia Melaka, Melaka, Malaysia. (Submitted)

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Abstract

The use of chemical sensor for biomedical field in-field is gaining interest due to their advantages over conventional sensors. Among them chemical sensor ISFET based on semiconductor technology offer additional advantages such as small size, robustness, low output impedance and rapid response make it suitable for biomedical application. Nowadays, diabetes arises as a major public health concern in Malaysia since the prevalence of diabetes have been escalated throughout the years. Glucose monitoring has become an integral part of diabetes care but has some limitations in accuracy. While conventional blood glucose monitoring meter requires the use of disposable blood glucose test strip with the need for routine finger pricks. The project is carried out to design an Ion-Selective Field Effect Transistor (ISFET) based biosensor that is able to detect pH concentration using Silvaco software. The work is based on simulation study using Silvaco ATHENA and Silvaco ATLAS. The ISFET designed is characterized and the performance is analysed based on the critical parameter namely pH value and threshold voltage. Effect of the gate channel length and sensing layer’s thickness on the pH sensitivity is discussed in this study. The sensitivity of ISFET designed is the highest when the thickness of tantalum oxide sensing layer is 0.55nm and the gate channel length is 100nm

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