Optimization Of Geometric Design Of A Linear Type Motion Electrostatic Actuator Using Finite Element Method (FEM)

Lee, Chee Keen (2016) Optimization Of Geometric Design Of A Linear Type Motion Electrostatic Actuator Using Finite Element Method (FEM). Project Report. UTeM, Melaka, Malaysia . (Submitted)

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Abstract

This research studies on the design and analysis of a linear motion type electrostatic actuator by using Finite Element Method (FEM) with the aid of ANSYS Maxwell 3D version 15.0. The main concern in this research is to analyze the electrostatic characteristics of a linear motion electrostatic actuator as well as geometric characteristics followed by improvements on its efficiency. This simulation software is selected due to its flexibility in simulating force, torque and electric field. Generally, electrostatic actuator is a subtopic under Micro Electro-mechanical System (MEMS) technology which has limited work range as compared to the other MEMS family members. However, its property of being highly sensitive and highly efficiency in microscale has given it a chance to compete with other type of actuators in reality such as implementation in optical display, biomedical and aerospace. However, the main weakness of electrostatic actuator is that, it might require high voltage during actuation with efficient. For this research, the geometric parameters that will affect the actuation are tested and studied which are ratio of electrode-to-spacer of both mover and stator (ES), size of the electrostatic actuator (mm3) and number of electrodes (n) of both mover and stator. The design of the electrostatic actuator has taken into consideration of three dimensional forces which are actuation force (

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