Development Of Surface-Micromachined Capacitive Microelectromechanical Systems (MEMS) Microphones

Shalini, P. Janasekaran (2014) Development Of Surface-Micromachined Capacitive Microelectromechanical Systems (MEMS) Microphones. Project Report. UTeM, Melaka, Malaysia. (Submitted)

Text (24 pages) Development Of Surface-Micromachined Capacitive Microelectromechanical Systems (MEMS) Microphones 24 Pages.pdf - Submitted Version Download (403kB)

Abstract

Microphones transduce acoustic input into electrical signals and are essentially used in mobile phones, computers and hearing aids. The MEMS-type capacitive microphones have emerged to replace the conventional electret condenser microphones due to the compact size and high signal to noise ratio. However, the previous MEMStype capacitive microphones are not compatible with CMOS (complementary metal oxide semiconductor) processes. Thus, surface-micromachined capacitive MEMS microphones are suggested in this study. Novel design and mathematical analysis (analytical and finite element models) of the proposed MEMS microphone will be conducted in order to obtain high sensitivity and fully CMOS-compatible process. The study will aid the fabrication of high sensitivity surface-micromachined capacitive MEMS microphones and can be possibly be integrated with other CMOS devices.

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